4/14/2011	10:49:10 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
4/14/2011	10:49:11 AM	Recipe started at 10:49 AM
4/14/2011	10:49:11 AM	Helium valve closed
4/14/2011	10:49:11 AM	H2 valve closed
4/14/2011	10:49:11 AM	BCl3 valve closed
4/14/2011	10:49:11 AM	PH3 valve closed
4/14/2011	10:49:11 AM	SiCl4 pre valve closed
4/14/2011	10:49:11 AM	SiCl4 post valve closed
4/14/2011	10:49:11 AM	Main Vac valve closed
4/14/2011	10:49:11 AM	Bypass valve closed
4/14/2011	10:49:11 AM	Bubbler valve closed
4/14/2011	10:49:11 AM	Helium MFC set to  0.000000
4/14/2011	10:49:11 AM	H2 MFC set to  0.000000
4/14/2011	10:49:11 AM	BCl3 MFC set to  0.000000
4/14/2011	10:49:11 AM	PHl3 MFC set to  0.000000
4/14/2011	10:49:11 AM	SiCl4 MFC set to  0.000000
4/14/2011	10:49:11 AM	Bypass solenoid MFC set to  0.000000
4/14/2011	10:49:11 AM	Tube furnace set to 0
4/14/2011	10:49:11 AM	Run finished at 10:49 AM
4/14/2011	10:49:11 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
4/14/2011	10:49:16 AM	Program exited cleanly
4/14/2011	11:20:22 AM	Program started normally
4/14/2011	11:20:22 AM	Helium valve closed
4/14/2011	11:20:22 AM	H2 valve closed
4/14/2011	11:20:22 AM	BCl3 valve closed
4/14/2011	11:20:22 AM	PH3 valve closed
4/14/2011	11:20:22 AM	SiCl4 pre valve closed
4/14/2011	11:20:22 AM	SiCl4 post valve closed
4/14/2011	11:20:22 AM	Main Vac valve closed
4/14/2011	11:20:22 AM	Bypass valve closed
4/14/2011	11:20:22 AM	Bubbler valve closed
4/14/2011	11:20:22 AM	Helium MFC set to  0.000000
4/14/2011	11:20:22 AM	H2 MFC set to  0.000000
4/14/2011	11:20:22 AM	BCl3 MFC set to  0.000000
4/14/2011	11:20:22 AM	PHl3 MFC set to  0.000000
4/14/2011	11:20:22 AM	SiCl4 MFC set to  0.000000
4/14/2011	11:20:22 AM	Bypass solenoid MFC set to  760.000000
4/14/2011	11:20:22 AM	Tube furnace set to 0
4/14/2011	11:20:30 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/14/2011	11:20:31 AM	Recipe started at 11:20 AM
4/14/2011	11:20:31 AM	H2 valve closed
4/14/2011	11:20:31 AM	BCl3 valve closed
4/14/2011	11:20:31 AM	PH3 valve closed
4/14/2011	11:20:31 AM	SiCl4 pre valve closed
4/14/2011	11:20:31 AM	SiCl4 post valve closed
4/14/2011	11:20:31 AM	Main Vac valve closed
4/14/2011	11:20:31 AM	Bypass valve closed
4/14/2011	11:20:31 AM	Bubbler valve closed
4/14/2011	11:20:31 AM	Helium valve opened
4/14/2011	11:20:31 AM	Helium MFC set to  500.000000
4/14/2011	11:20:31 AM	H2 MFC set to  0.000000
4/14/2011	11:20:31 AM	BCl3 MFC set to  0.000000
4/14/2011	11:20:31 AM	PHl3 MFC set to  0.000000
4/14/2011	11:20:31 AM	SiCl4 MFC set to  0.000000
4/14/2011	11:20:31 AM	Bypass solenoid MFC set to  0.000000
4/14/2011	11:20:32 AM	Tube furnace set to 0
4/14/2011	11:22:09 AM	Run aborted at 11:22 AM
4/14/2011	11:22:09 AM	Helium valve closed
4/14/2011	11:22:09 AM	H2 valve closed
4/14/2011	11:22:09 AM	BCl3 valve closed
4/14/2011	11:22:09 AM	PH3 valve closed
4/14/2011	11:22:09 AM	SiCl4 pre valve closed
4/14/2011	11:22:09 AM	SiCl4 post valve closed
4/14/2011	11:22:09 AM	Bypass valve closed
4/14/2011	11:22:09 AM	Main Vac valve closed
4/14/2011	11:22:09 AM	Bubbler valve closed
4/14/2011	11:22:09 AM	Helium MFC set to  0.000000
4/14/2011	11:22:09 AM	H2 MFC set to  0.000000
4/14/2011	11:22:09 AM	BCl3 MFC set to  0.000000
4/14/2011	11:22:09 AM	PHl3 MFC set to  0.000000
4/14/2011	11:22:09 AM	SiCl4 MFC set to  0.000000
4/14/2011	11:22:09 AM	Tube furnace set to 0
4/14/2011	11:22:09 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/14/2011	11:31:48 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/14/2011	11:31:48 AM	Recipe started at 11:31 AM
4/14/2011	11:31:48 AM	H2 valve closed
4/14/2011	11:31:48 AM	BCl3 valve closed
4/14/2011	11:31:48 AM	PH3 valve closed
4/14/2011	11:31:48 AM	SiCl4 pre valve closed
4/14/2011	11:31:48 AM	SiCl4 post valve closed
4/14/2011	11:31:48 AM	Main Vac valve closed
4/14/2011	11:31:48 AM	Bypass valve closed
4/14/2011	11:31:48 AM	Bubbler valve closed
4/14/2011	11:31:48 AM	Helium valve opened
4/14/2011	11:31:48 AM	Helium MFC set to  500.000000
4/14/2011	11:31:48 AM	H2 MFC set to  0.000000
4/14/2011	11:31:48 AM	BCl3 MFC set to  0.000000
4/14/2011	11:31:48 AM	PHl3 MFC set to  0.000000
4/14/2011	11:31:48 AM	SiCl4 MFC set to  0.000000
4/14/2011	11:31:48 AM	Bypass solenoid MFC set to  0.000000
4/14/2011	11:31:49 AM	Tube furnace set to 0
4/14/2011	11:33:06 AM	Helium valve closed
4/14/2011	11:33:06 AM	H2 valve closed
4/14/2011	11:33:06 AM	BCl3 valve closed
4/14/2011	11:33:06 AM	PH3 valve closed
4/14/2011	11:33:06 AM	SiCl4 pre valve closed
4/14/2011	11:33:06 AM	SiCl4 post valve closed
4/14/2011	11:33:06 AM	Main Vac valve closed
4/14/2011	11:33:06 AM	Bypass valve closed
4/14/2011	11:33:06 AM	Bubbler valve closed
4/14/2011	11:33:06 AM	Helium MFC set to  0.000000
4/14/2011	11:33:06 AM	H2 MFC set to  0.000000
4/14/2011	11:33:06 AM	BCl3 MFC set to  0.000000
4/14/2011	11:33:06 AM	PHl3 MFC set to  0.000000
4/14/2011	11:33:06 AM	SiCl4 MFC set to  0.000000
4/14/2011	11:33:06 AM	Bypass solenoid MFC set to  0.000000
4/14/2011	11:33:07 AM	Tube furnace set to 0
4/14/2011	11:33:07 AM	Run finished at 11:33 AM
4/14/2011	11:33:07 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/14/2011	11:49:00 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/14/2011	11:49:00 AM	Recipe started at 11:49 AM
4/14/2011	11:49:00 AM	Helium valve closed
4/14/2011	11:49:00 AM	H2 valve closed
4/14/2011	11:49:00 AM	BCl3 valve closed
4/14/2011	11:49:00 AM	PH3 valve closed
4/14/2011	11:49:00 AM	SiCl4 pre valve closed
4/14/2011	11:49:00 AM	SiCl4 post valve closed
4/14/2011	11:49:00 AM	Main Vac valve closed
4/14/2011	11:49:00 AM	Bubbler valve closed
4/14/2011	11:49:00 AM	Bypass valve opened
4/14/2011	11:49:00 AM	Helium MFC set to  0.000000
4/14/2011	11:49:00 AM	H2 MFC set to  0.000000
4/14/2011	11:49:00 AM	BCl3 MFC set to  0.000000
4/14/2011	11:49:00 AM	PHl3 MFC set to  0.000000
4/14/2011	11:49:00 AM	SiCl4 MFC set to  0.000000
4/14/2011	11:49:00 AM	Bypass solenoid MFC set to  0.000000
4/14/2011	11:49:00 AM	Tube furnace set to 0
4/14/2011	11:49:32 AM	Helium valve closed
4/14/2011	11:49:32 AM	H2 valve closed
4/14/2011	11:49:32 AM	BCl3 valve closed
4/14/2011	11:49:32 AM	PH3 valve closed
4/14/2011	11:49:32 AM	SiCl4 pre valve closed
4/14/2011	11:49:32 AM	SiCl4 post valve closed
4/14/2011	11:49:32 AM	Bubbler valve closed
4/14/2011	11:49:32 AM	Main Vac valve opened
4/14/2011	11:49:32 AM	Bypass valve opened
4/14/2011	11:49:32 AM	Helium MFC set to  0.000000
4/14/2011	11:49:32 AM	H2 MFC set to  0.000000
4/14/2011	11:49:32 AM	BCl3 MFC set to  0.000000
4/14/2011	11:49:32 AM	PHl3 MFC set to  0.000000
4/14/2011	11:49:32 AM	SiCl4 MFC set to  0.000000
4/14/2011	11:49:32 AM	Bypass solenoid MFC set to  0.000000
4/14/2011	11:49:32 AM	Tube furnace set to 0
4/14/2011	11:49:33 AM	Run finished at 11:49 AM
4/14/2011	11:49:33 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/14/2011	11:49:58 AM	Tube furnace set to 300
4/14/2011	11:54:30 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
4/14/2011	11:54:42 AM	Recipe started at 11:54 AM
4/14/2011	11:54:42 AM	Helium valve closed
4/14/2011	11:54:42 AM	H2 valve closed
4/14/2011	11:54:42 AM	BCl3 valve closed
4/14/2011	11:54:42 AM	PH3 valve closed
4/14/2011	11:54:42 AM	SiCl4 pre valve closed
4/14/2011	11:54:42 AM	SiCl4 post valve closed
4/14/2011	11:54:42 AM	Main Vac valve closed
4/14/2011	11:54:42 AM	Bubbler valve closed
4/14/2011	11:54:42 AM	Bypass valve opened
4/14/2011	11:54:42 AM	Helium MFC set to  0.000000
4/14/2011	11:54:42 AM	H2 MFC set to  0.000000
4/14/2011	11:54:42 AM	BCl3 MFC set to  0.000000
4/14/2011	11:54:42 AM	PHl3 MFC set to  0.000000
4/14/2011	11:54:42 AM	SiCl4 MFC set to  0.000000
4/14/2011	11:54:42 AM	Bypass solenoid MFC set to  0.000000
4/14/2011	11:54:42 AM	Tube furnace set to 0
4/14/2011	11:54:42 AM	Helium valve closed
4/14/2011	11:54:42 AM	H2 valve closed
4/14/2011	11:54:42 AM	BCl3 valve closed
4/14/2011	11:54:42 AM	PH3 valve closed
4/14/2011	11:54:42 AM	SiCl4 pre valve closed
4/14/2011	11:54:42 AM	SiCl4 post valve closed
4/14/2011	11:54:42 AM	Bubbler valve closed
4/14/2011	11:54:42 AM	Main Vac valve opened
4/14/2011	11:54:42 AM	Bypass valve opened
4/14/2011	11:54:42 AM	Helium MFC set to  0.000000
4/14/2011	11:54:42 AM	H2 MFC set to  0.000000
4/14/2011	11:54:42 AM	BCl3 MFC set to  0.000000
4/14/2011	11:54:42 AM	PHl3 MFC set to  0.000000
4/14/2011	11:54:42 AM	SiCl4 MFC set to  0.000000
4/14/2011	11:54:42 AM	Bypass solenoid MFC set to  0.000000
4/14/2011	11:54:43 AM	Tube furnace set to 0
4/14/2011	11:55:43 AM	H2 valve closed
4/14/2011	11:55:43 AM	BCl3 valve closed
4/14/2011	11:55:43 AM	PH3 valve closed
4/14/2011	11:55:43 AM	SiCl4 pre valve closed
4/14/2011	11:55:43 AM	SiCl4 post valve closed
4/14/2011	11:55:43 AM	Bubbler valve closed
4/14/2011	11:55:43 AM	Helium valve opened
4/14/2011	11:55:43 AM	Main Vac valve opened
4/14/2011	11:55:43 AM	Bypass valve opened
4/14/2011	11:55:43 AM	Helium MFC set to  100.000000
4/14/2011	11:55:43 AM	H2 MFC set to  0.000000
4/14/2011	11:55:43 AM	BCl3 MFC set to  0.000000
4/14/2011	11:55:43 AM	PHl3 MFC set to  0.000000
4/14/2011	11:55:43 AM	SiCl4 MFC set to  0.000000
4/14/2011	11:55:43 AM	Bypass solenoid MFC set to  0.000000
4/14/2011	11:55:43 AM	Tube furnace set to 0
4/14/2011	11:56:43 AM	Helium valve closed
4/14/2011	11:56:43 AM	H2 valve closed
4/14/2011	11:56:43 AM	BCl3 valve closed
4/14/2011	11:56:43 AM	PH3 valve closed
4/14/2011	11:56:43 AM	SiCl4 pre valve closed
4/14/2011	11:56:43 AM	SiCl4 post valve closed
4/14/2011	11:56:43 AM	Bubbler valve closed
4/14/2011	11:56:43 AM	Main Vac valve opened
4/14/2011	11:56:43 AM	Bypass valve opened
4/14/2011	11:56:43 AM	Helium MFC set to  0.000000
4/14/2011	11:56:43 AM	H2 MFC set to  0.000000
4/14/2011	11:56:43 AM	BCl3 MFC set to  0.000000
4/14/2011	11:56:43 AM	PHl3 MFC set to  0.000000
4/14/2011	11:56:43 AM	SiCl4 MFC set to  0.000000
4/14/2011	11:56:43 AM	Bypass solenoid MFC set to  0.000000
4/14/2011	11:56:43 AM	Tube furnace set to 0
4/14/2011	11:57:43 AM	H2 valve closed
4/14/2011	11:57:43 AM	BCl3 valve closed
4/14/2011	11:57:43 AM	PH3 valve closed
4/14/2011	11:57:43 AM	SiCl4 pre valve closed
4/14/2011	11:57:43 AM	SiCl4 post valve closed
4/14/2011	11:57:43 AM	Bubbler valve closed
4/14/2011	11:57:43 AM	Helium valve opened
4/14/2011	11:57:43 AM	Main Vac valve opened
4/14/2011	11:57:43 AM	Bypass valve opened
4/14/2011	11:57:43 AM	Helium MFC set to  100.000000
4/14/2011	11:57:43 AM	H2 MFC set to  0.000000
4/14/2011	11:57:43 AM	BCl3 MFC set to  0.000000
4/14/2011	11:57:43 AM	PHl3 MFC set to  0.000000
4/14/2011	11:57:43 AM	SiCl4 MFC set to  0.000000
4/14/2011	11:57:43 AM	Bypass solenoid MFC set to  0.000000
4/14/2011	11:57:43 AM	Tube furnace set to 0
4/14/2011	11:58:43 AM	Helium valve closed
4/14/2011	11:58:43 AM	H2 valve closed
4/14/2011	11:58:43 AM	BCl3 valve closed
4/14/2011	11:58:43 AM	PH3 valve closed
4/14/2011	11:58:43 AM	SiCl4 pre valve closed
4/14/2011	11:58:43 AM	SiCl4 post valve closed
4/14/2011	11:58:43 AM	Bubbler valve closed
4/14/2011	11:58:43 AM	Main Vac valve opened
4/14/2011	11:58:43 AM	Bypass valve opened
4/14/2011	11:58:43 AM	Helium MFC set to  0.000000
4/14/2011	11:58:43 AM	H2 MFC set to  0.000000
4/14/2011	11:58:43 AM	BCl3 MFC set to  0.000000
4/14/2011	11:58:43 AM	PHl3 MFC set to  0.000000
4/14/2011	11:58:43 AM	SiCl4 MFC set to  0.000000
4/14/2011	11:58:43 AM	Bypass solenoid MFC set to  0.000000
4/14/2011	11:58:43 AM	Tube furnace set to 0
4/14/2011	11:59:43 AM	H2 valve closed
4/14/2011	11:59:43 AM	BCl3 valve closed
4/14/2011	11:59:43 AM	PH3 valve closed
4/14/2011	11:59:43 AM	SiCl4 pre valve closed
4/14/2011	11:59:43 AM	SiCl4 post valve closed
4/14/2011	11:59:43 AM	Bubbler valve closed
4/14/2011	11:59:43 AM	Helium valve opened
4/14/2011	11:59:43 AM	Main Vac valve opened
4/14/2011	11:59:43 AM	Bypass valve opened
4/14/2011	11:59:43 AM	Helium MFC set to  100.000000
4/14/2011	11:59:43 AM	H2 MFC set to  0.000000
4/14/2011	11:59:43 AM	BCl3 MFC set to  0.000000
4/14/2011	11:59:43 AM	PHl3 MFC set to  0.000000
4/14/2011	11:59:43 AM	SiCl4 MFC set to  0.000000
4/14/2011	11:59:43 AM	Bypass solenoid MFC set to  0.000000
4/14/2011	11:59:44 AM	Tube furnace set to 0
4/14/2011	12:00:44 PM	Helium valve closed
4/14/2011	12:00:44 PM	H2 valve closed
4/14/2011	12:00:44 PM	BCl3 valve closed
4/14/2011	12:00:44 PM	PH3 valve closed
4/14/2011	12:00:44 PM	SiCl4 pre valve closed
4/14/2011	12:00:44 PM	SiCl4 post valve closed
4/14/2011	12:00:44 PM	Bubbler valve closed
4/14/2011	12:00:44 PM	Main Vac valve opened
4/14/2011	12:00:44 PM	Bypass valve opened
4/14/2011	12:00:44 PM	Helium MFC set to  0.000000
4/14/2011	12:00:44 PM	H2 MFC set to  0.000000
4/14/2011	12:00:44 PM	BCl3 MFC set to  0.000000
4/14/2011	12:00:44 PM	PHl3 MFC set to  0.000000
4/14/2011	12:00:44 PM	SiCl4 MFC set to  0.000000
4/14/2011	12:00:44 PM	Bypass solenoid MFC set to  0.000000
4/14/2011	12:00:44 PM	Tube furnace set to 0
4/14/2011	12:01:44 PM	H2 valve closed
4/14/2011	12:01:44 PM	BCl3 valve closed
4/14/2011	12:01:44 PM	PH3 valve closed
4/14/2011	12:01:44 PM	SiCl4 pre valve closed
4/14/2011	12:01:44 PM	SiCl4 post valve closed
4/14/2011	12:01:44 PM	Bubbler valve closed
4/14/2011	12:01:44 PM	Helium valve opened
4/14/2011	12:01:44 PM	Main Vac valve opened
4/14/2011	12:01:44 PM	Bypass valve opened
4/14/2011	12:01:44 PM	Helium MFC set to  100.000000
4/14/2011	12:01:44 PM	H2 MFC set to  0.000000
4/14/2011	12:01:44 PM	BCl3 MFC set to  0.000000
4/14/2011	12:01:44 PM	PHl3 MFC set to  0.000000
4/14/2011	12:01:44 PM	SiCl4 MFC set to  0.000000
4/14/2011	12:01:44 PM	Bypass solenoid MFC set to  0.000000
4/14/2011	12:01:44 PM	Tube furnace set to 0
4/14/2011	12:02:44 PM	Helium valve closed
4/14/2011	12:02:44 PM	H2 valve closed
4/14/2011	12:02:44 PM	BCl3 valve closed
4/14/2011	12:02:44 PM	PH3 valve closed
4/14/2011	12:02:44 PM	SiCl4 pre valve closed
4/14/2011	12:02:44 PM	SiCl4 post valve closed
4/14/2011	12:02:44 PM	Bubbler valve closed
4/14/2011	12:02:44 PM	Main Vac valve opened
4/14/2011	12:02:44 PM	Bypass valve opened
4/14/2011	12:02:44 PM	Helium MFC set to  0.000000
4/14/2011	12:02:44 PM	H2 MFC set to  0.000000
4/14/2011	12:02:44 PM	BCl3 MFC set to  0.000000
4/14/2011	12:02:44 PM	PHl3 MFC set to  0.000000
4/14/2011	12:02:44 PM	SiCl4 MFC set to  0.000000
4/14/2011	12:02:44 PM	Bypass solenoid MFC set to  0.000000
4/14/2011	12:02:44 PM	Tube furnace set to 0
4/14/2011	12:03:44 PM	H2 valve closed
4/14/2011	12:03:44 PM	BCl3 valve closed
4/14/2011	12:03:44 PM	PH3 valve closed
4/14/2011	12:03:44 PM	SiCl4 pre valve closed
4/14/2011	12:03:44 PM	SiCl4 post valve closed
4/14/2011	12:03:44 PM	Bubbler valve closed
4/14/2011	12:03:44 PM	Helium valve opened
4/14/2011	12:03:44 PM	Main Vac valve opened
4/14/2011	12:03:44 PM	Bypass valve opened
4/14/2011	12:03:44 PM	Helium MFC set to  100.000000
4/14/2011	12:03:44 PM	H2 MFC set to  0.000000
4/14/2011	12:03:44 PM	BCl3 MFC set to  0.000000
4/14/2011	12:03:44 PM	PHl3 MFC set to  0.000000
4/14/2011	12:03:44 PM	SiCl4 MFC set to  0.000000
4/14/2011	12:03:44 PM	Bypass solenoid MFC set to  0.000000
4/14/2011	12:03:44 PM	Tube furnace set to 0
4/14/2011	12:04:44 PM	Helium valve closed
4/14/2011	12:04:44 PM	H2 valve closed
4/14/2011	12:04:44 PM	BCl3 valve closed
4/14/2011	12:04:44 PM	PH3 valve closed
4/14/2011	12:04:44 PM	SiCl4 pre valve closed
4/14/2011	12:04:44 PM	SiCl4 post valve closed
4/14/2011	12:04:44 PM	Bubbler valve closed
4/14/2011	12:04:44 PM	Main Vac valve opened
4/14/2011	12:04:44 PM	Bypass valve opened
4/14/2011	12:04:44 PM	Helium MFC set to  0.000000
4/14/2011	12:04:44 PM	H2 MFC set to  0.000000
4/14/2011	12:04:44 PM	BCl3 MFC set to  0.000000
4/14/2011	12:04:44 PM	PHl3 MFC set to  0.000000
4/14/2011	12:04:44 PM	SiCl4 MFC set to  0.000000
4/14/2011	12:04:44 PM	Bypass solenoid MFC set to  0.000000
4/14/2011	12:04:45 PM	Tube furnace set to 0
4/14/2011	12:05:45 PM	H2 valve closed
4/14/2011	12:05:45 PM	BCl3 valve closed
4/14/2011	12:05:45 PM	PH3 valve closed
4/14/2011	12:05:45 PM	SiCl4 pre valve closed
4/14/2011	12:05:45 PM	SiCl4 post valve closed
4/14/2011	12:05:45 PM	Bubbler valve closed
4/14/2011	12:05:45 PM	Helium valve opened
4/14/2011	12:05:45 PM	Main Vac valve opened
4/14/2011	12:05:45 PM	Bypass valve opened
4/14/2011	12:05:45 PM	Helium MFC set to  100.000000
4/14/2011	12:05:45 PM	H2 MFC set to  0.000000
4/14/2011	12:05:45 PM	BCl3 MFC set to  0.000000
4/14/2011	12:05:45 PM	PHl3 MFC set to  0.000000
4/14/2011	12:05:45 PM	SiCl4 MFC set to  0.000000
4/14/2011	12:05:45 PM	Bypass solenoid MFC set to  0.000000
4/14/2011	12:05:45 PM	Tube furnace set to 0
4/14/2011	12:06:45 PM	Helium valve closed
4/14/2011	12:06:45 PM	H2 valve closed
4/14/2011	12:06:45 PM	BCl3 valve closed
4/14/2011	12:06:45 PM	PH3 valve closed
4/14/2011	12:06:45 PM	SiCl4 pre valve closed
4/14/2011	12:06:45 PM	SiCl4 post valve closed
4/14/2011	12:06:45 PM	Bubbler valve closed
4/14/2011	12:06:45 PM	Main Vac valve opened
4/14/2011	12:06:45 PM	Bypass valve opened
4/14/2011	12:06:45 PM	Helium MFC set to  0.000000
4/14/2011	12:06:45 PM	H2 MFC set to  0.000000
4/14/2011	12:06:45 PM	BCl3 MFC set to  0.000000
4/14/2011	12:06:45 PM	PHl3 MFC set to  0.000000
4/14/2011	12:06:45 PM	SiCl4 MFC set to  0.000000
4/14/2011	12:06:45 PM	Bypass solenoid MFC set to  0.000000
4/14/2011	12:06:45 PM	Tube furnace set to 0
4/14/2011	12:07:45 PM	H2 valve closed
4/14/2011	12:07:45 PM	BCl3 valve closed
4/14/2011	12:07:45 PM	PH3 valve closed
4/14/2011	12:07:45 PM	SiCl4 pre valve closed
4/14/2011	12:07:45 PM	SiCl4 post valve closed
4/14/2011	12:07:45 PM	Bubbler valve closed
4/14/2011	12:07:45 PM	Helium valve opened
4/14/2011	12:07:45 PM	Main Vac valve opened
4/14/2011	12:07:45 PM	Bypass valve opened
4/14/2011	12:07:45 PM	Helium MFC set to  100.000000
4/14/2011	12:07:45 PM	H2 MFC set to  0.000000
4/14/2011	12:07:45 PM	BCl3 MFC set to  0.000000
4/14/2011	12:07:45 PM	PHl3 MFC set to  0.000000
4/14/2011	12:07:45 PM	SiCl4 MFC set to  0.000000
4/14/2011	12:07:45 PM	Bypass solenoid MFC set to  0.000000
4/14/2011	12:07:45 PM	Tube furnace set to 0
4/14/2011	12:08:45 PM	Helium valve closed
4/14/2011	12:08:45 PM	H2 valve closed
4/14/2011	12:08:45 PM	BCl3 valve closed
4/14/2011	12:08:45 PM	PH3 valve closed
4/14/2011	12:08:45 PM	SiCl4 pre valve closed
4/14/2011	12:08:45 PM	SiCl4 post valve closed
4/14/2011	12:08:45 PM	Bubbler valve closed
4/14/2011	12:08:45 PM	Main Vac valve opened
4/14/2011	12:08:45 PM	Bypass valve opened
4/14/2011	12:08:45 PM	Helium MFC set to  0.000000
4/14/2011	12:08:45 PM	H2 MFC set to  0.000000
4/14/2011	12:08:45 PM	BCl3 MFC set to  0.000000
4/14/2011	12:08:45 PM	PHl3 MFC set to  0.000000
4/14/2011	12:08:45 PM	SiCl4 MFC set to  0.000000
4/14/2011	12:08:45 PM	Bypass solenoid MFC set to  0.000000
4/14/2011	12:08:45 PM	Tube furnace set to 0
4/14/2011	12:09:45 PM	H2 valve closed
4/14/2011	12:09:45 PM	BCl3 valve closed
4/14/2011	12:09:45 PM	PH3 valve closed
4/14/2011	12:09:45 PM	SiCl4 pre valve closed
4/14/2011	12:09:45 PM	SiCl4 post valve closed
4/14/2011	12:09:45 PM	Bubbler valve closed
4/14/2011	12:09:45 PM	Helium valve opened
4/14/2011	12:09:45 PM	Main Vac valve opened
4/14/2011	12:09:45 PM	Bypass valve opened
4/14/2011	12:09:45 PM	Helium MFC set to  100.000000
4/14/2011	12:09:45 PM	H2 MFC set to  0.000000
4/14/2011	12:09:45 PM	BCl3 MFC set to  0.000000
4/14/2011	12:09:45 PM	PHl3 MFC set to  0.000000
4/14/2011	12:09:45 PM	SiCl4 MFC set to  0.000000
4/14/2011	12:09:45 PM	Bypass solenoid MFC set to  0.000000
4/14/2011	12:09:46 PM	Tube furnace set to 0
4/14/2011	12:10:46 PM	Helium valve closed
4/14/2011	12:10:46 PM	H2 valve closed
4/14/2011	12:10:46 PM	BCl3 valve closed
4/14/2011	12:10:46 PM	PH3 valve closed
4/14/2011	12:10:46 PM	SiCl4 pre valve closed
4/14/2011	12:10:46 PM	SiCl4 post valve closed
4/14/2011	12:10:46 PM	Bubbler valve closed
4/14/2011	12:10:46 PM	Main Vac valve opened
4/14/2011	12:10:46 PM	Bypass valve opened
4/14/2011	12:10:46 PM	Helium MFC set to  0.000000
4/14/2011	12:10:46 PM	H2 MFC set to  0.000000
4/14/2011	12:10:46 PM	BCl3 MFC set to  0.000000
4/14/2011	12:10:46 PM	PHl3 MFC set to  0.000000
4/14/2011	12:10:46 PM	SiCl4 MFC set to  0.000000
4/14/2011	12:10:46 PM	Bypass solenoid MFC set to  0.000000
4/14/2011	12:10:46 PM	Tube furnace set to 0
4/14/2011	12:11:46 PM	H2 valve closed
4/14/2011	12:11:46 PM	BCl3 valve closed
4/14/2011	12:11:46 PM	PH3 valve closed
4/14/2011	12:11:46 PM	SiCl4 pre valve closed
4/14/2011	12:11:46 PM	SiCl4 post valve closed
4/14/2011	12:11:46 PM	Bubbler valve closed
4/14/2011	12:11:46 PM	Helium valve opened
4/14/2011	12:11:46 PM	Main Vac valve opened
4/14/2011	12:11:46 PM	Bypass valve opened
4/14/2011	12:11:46 PM	Helium MFC set to  100.000000
4/14/2011	12:11:46 PM	H2 MFC set to  0.000000
4/14/2011	12:11:46 PM	BCl3 MFC set to  0.000000
4/14/2011	12:11:46 PM	PHl3 MFC set to  0.000000
4/14/2011	12:11:46 PM	SiCl4 MFC set to  0.000000
4/14/2011	12:11:46 PM	Bypass solenoid MFC set to  0.000000
4/14/2011	12:11:46 PM	Tube furnace set to 0
4/14/2011	12:12:46 PM	Helium valve closed
4/14/2011	12:12:46 PM	H2 valve closed
4/14/2011	12:12:46 PM	BCl3 valve closed
4/14/2011	12:12:46 PM	PH3 valve closed
4/14/2011	12:12:46 PM	SiCl4 pre valve closed
4/14/2011	12:12:46 PM	SiCl4 post valve closed
4/14/2011	12:12:46 PM	Bubbler valve closed
4/14/2011	12:12:46 PM	Main Vac valve opened
4/14/2011	12:12:46 PM	Bypass valve opened
4/14/2011	12:12:46 PM	Helium MFC set to  0.000000
4/14/2011	12:12:46 PM	H2 MFC set to  0.000000
4/14/2011	12:12:46 PM	BCl3 MFC set to  0.000000
4/14/2011	12:12:46 PM	PHl3 MFC set to  0.000000
4/14/2011	12:12:46 PM	SiCl4 MFC set to  0.000000
4/14/2011	12:12:46 PM	Bypass solenoid MFC set to  0.000000
4/14/2011	12:12:46 PM	Tube furnace set to 0
4/14/2011	12:13:46 PM	H2 valve closed
4/14/2011	12:13:46 PM	BCl3 valve closed
4/14/2011	12:13:46 PM	PH3 valve closed
4/14/2011	12:13:46 PM	SiCl4 pre valve closed
4/14/2011	12:13:46 PM	SiCl4 post valve closed
4/14/2011	12:13:46 PM	Bubbler valve closed
4/14/2011	12:13:46 PM	Helium valve opened
4/14/2011	12:13:46 PM	Main Vac valve opened
4/14/2011	12:13:46 PM	Bypass valve opened
4/14/2011	12:13:46 PM	Helium MFC set to  100.000000
4/14/2011	12:13:46 PM	H2 MFC set to  0.000000
4/14/2011	12:13:46 PM	BCl3 MFC set to  0.000000
4/14/2011	12:13:46 PM	PHl3 MFC set to  0.000000
4/14/2011	12:13:46 PM	SiCl4 MFC set to  0.000000
4/14/2011	12:13:46 PM	Bypass solenoid MFC set to  0.000000
4/14/2011	12:13:46 PM	Tube furnace set to 0
4/14/2011	12:14:46 PM	Helium valve closed
4/14/2011	12:14:46 PM	H2 valve closed
4/14/2011	12:14:46 PM	BCl3 valve closed
4/14/2011	12:14:46 PM	PH3 valve closed
4/14/2011	12:14:46 PM	SiCl4 pre valve closed
4/14/2011	12:14:46 PM	SiCl4 post valve closed
4/14/2011	12:14:46 PM	Bubbler valve closed
4/14/2011	12:14:46 PM	Main Vac valve opened
4/14/2011	12:14:46 PM	Bypass valve opened
4/14/2011	12:14:46 PM	Helium MFC set to  0.000000
4/14/2011	12:14:46 PM	H2 MFC set to  0.000000
4/14/2011	12:14:46 PM	BCl3 MFC set to  0.000000
4/14/2011	12:14:46 PM	PHl3 MFC set to  0.000000
4/14/2011	12:14:46 PM	SiCl4 MFC set to  0.000000
4/14/2011	12:14:46 PM	Bypass solenoid MFC set to  0.000000
4/14/2011	12:14:47 PM	Tube furnace set to 0
4/14/2011	12:14:48 PM	Run finished at 12:14 PM
4/14/2011	12:14:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
4/14/2011	12:38:10 PM	Helium valve opened
4/14/2011	12:38:13 PM	Helium MFC set to  100.000000
4/14/2011	12:39:38 PM	Helium MFC set to  0.000000
4/14/2011	12:39:40 PM	Helium valve closed
4/14/2011	12:40:50 PM	Recipe started at 12:40 PM
4/14/2011	12:40:50 PM	Helium valve closed
4/14/2011	12:40:50 PM	BCl3 valve closed
4/14/2011	12:40:50 PM	PH3 valve closed
4/14/2011	12:40:50 PM	SiCl4 pre valve closed
4/14/2011	12:40:50 PM	SiCl4 post valve closed
4/14/2011	12:40:50 PM	Main Vac valve closed
4/14/2011	12:40:50 PM	Bypass valve closed
4/14/2011	12:40:50 PM	Bubbler valve closed
4/14/2011	12:40:50 PM	H2 valve opened
4/14/2011	12:40:50 PM	Helium MFC set to  0.000000
4/14/2011	12:40:50 PM	H2 MFC set to  500.000000
4/14/2011	12:40:50 PM	BCl3 MFC set to  0.000000
4/14/2011	12:40:50 PM	PHl3 MFC set to  0.000000
4/14/2011	12:40:50 PM	SiCl4 MFC set to  0.000000
4/14/2011	12:40:50 PM	Bypass solenoid MFC set to  0.000000
4/14/2011	12:40:50 PM	Tube furnace set to 0
4/14/2011	12:42:09 PM	Helium valve closed
4/14/2011	12:42:09 PM	BCl3 valve closed
4/14/2011	12:42:09 PM	PH3 valve closed
4/14/2011	12:42:09 PM	SiCl4 pre valve closed
4/14/2011	12:42:09 PM	SiCl4 post valve closed
4/14/2011	12:42:09 PM	Main Vac valve closed
4/14/2011	12:42:09 PM	Bypass valve closed
4/14/2011	12:42:09 PM	H2 valve opened
4/14/2011	12:42:09 PM	Bubbler valve opened
4/14/2011	12:42:09 PM	Helium MFC set to  0.000000
4/14/2011	12:42:09 PM	H2 MFC set to  500.000000
4/14/2011	12:42:09 PM	BCl3 MFC set to  0.000000
4/14/2011	12:42:09 PM	PHl3 MFC set to  0.000000
4/14/2011	12:42:09 PM	SiCl4 MFC set to  0.000000
4/14/2011	12:42:09 PM	Bypass solenoid MFC set to  0.000000
4/14/2011	12:42:09 PM	Tube furnace set to 1000
4/14/2011	12:42:10 PM	Helium valve closed
4/14/2011	12:42:10 PM	H2 valve closed
4/14/2011	12:42:10 PM	BCl3 valve closed
4/14/2011	12:42:10 PM	PH3 valve closed
4/14/2011	12:42:10 PM	SiCl4 pre valve closed
4/14/2011	12:42:10 PM	SiCl4 post valve closed
4/14/2011	12:42:10 PM	Main Vac valve closed
4/14/2011	12:42:10 PM	Bubbler valve closed
4/14/2011	12:42:10 PM	Bypass valve closed
4/14/2011	12:42:10 PM	Helium MFC set to  0.000000
4/14/2011	12:42:10 PM	H2 MFC set to  0.000000
4/14/2011	12:42:10 PM	BCl3 MFC set to  0.000000
4/14/2011	12:42:10 PM	PHl3 MFC set to  0.000000
4/14/2011	12:42:10 PM	SiCl4 MFC set to  0.000000
4/14/2011	12:42:10 PM	Bypass solenoid MFC set to  760.000000
4/14/2011	12:42:10 PM	Tube furnace set to 0
4/14/2011	12:42:10 PM	Baratron reads 749.484945 Torr and NaOH valve is open.  Emergency exit.
4/14/2011	12:42:40 PM	Run aborted at 12:42 PM
4/14/2011	12:42:48 PM	Recipe started at 12:42 PM
4/14/2011	12:42:48 PM	Helium valve closed
4/14/2011	12:42:48 PM	BCl3 valve closed
4/14/2011	12:42:48 PM	PH3 valve closed
4/14/2011	12:42:48 PM	SiCl4 pre valve closed
4/14/2011	12:42:48 PM	SiCl4 post valve closed
4/14/2011	12:42:48 PM	Main Vac valve closed
4/14/2011	12:42:48 PM	Bypass valve closed
4/14/2011	12:42:48 PM	Bubbler valve closed
4/14/2011	12:42:48 PM	H2 valve opened
4/14/2011	12:42:48 PM	Helium MFC set to  0.000000
4/14/2011	12:42:48 PM	H2 MFC set to  500.000000
4/14/2011	12:42:48 PM	BCl3 MFC set to  0.000000
4/14/2011	12:42:48 PM	PHl3 MFC set to  0.000000
4/14/2011	12:42:48 PM	SiCl4 MFC set to  0.000000
4/14/2011	12:42:48 PM	Bypass solenoid MFC set to  0.000000
4/14/2011	12:42:48 PM	Tube furnace set to 0
4/14/2011	12:42:51 PM	Helium valve closed
4/14/2011	12:42:51 PM	BCl3 valve closed
4/14/2011	12:42:51 PM	PH3 valve closed
4/14/2011	12:42:51 PM	SiCl4 pre valve closed
4/14/2011	12:42:51 PM	SiCl4 post valve closed
4/14/2011	12:42:51 PM	Main Vac valve closed
4/14/2011	12:42:51 PM	Bypass valve closed
4/14/2011	12:42:51 PM	H2 valve opened
4/14/2011	12:42:51 PM	Bubbler valve opened
4/14/2011	12:42:51 PM	Helium MFC set to  0.000000
4/14/2011	12:42:51 PM	H2 MFC set to  500.000000
4/14/2011	12:42:51 PM	BCl3 MFC set to  0.000000
4/14/2011	12:42:51 PM	PHl3 MFC set to  0.000000
4/14/2011	12:42:51 PM	SiCl4 MFC set to  0.000000
4/14/2011	12:42:51 PM	Bypass solenoid MFC set to  0.000000
4/14/2011	12:42:51 PM	Tube furnace set to 1000
4/14/2011	12:42:51 PM	Helium valve closed
4/14/2011	12:42:51 PM	H2 valve closed
4/14/2011	12:42:51 PM	BCl3 valve closed
4/14/2011	12:42:51 PM	PH3 valve closed
4/14/2011	12:42:51 PM	SiCl4 pre valve closed
4/14/2011	12:42:51 PM	SiCl4 post valve closed
4/14/2011	12:42:51 PM	Main Vac valve closed
4/14/2011	12:42:51 PM	Bubbler valve closed
4/14/2011	12:42:51 PM	Bypass valve closed
4/14/2011	12:42:51 PM	Helium MFC set to  0.000000
4/14/2011	12:42:51 PM	H2 MFC set to  0.000000
4/14/2011	12:42:51 PM	BCl3 MFC set to  0.000000
4/14/2011	12:42:51 PM	PHl3 MFC set to  0.000000
4/14/2011	12:42:51 PM	SiCl4 MFC set to  0.000000
4/14/2011	12:42:51 PM	Bypass solenoid MFC set to  760.000000
4/14/2011	12:42:51 PM	Tube furnace set to 0
4/14/2011	12:42:51 PM	Baratron reads 749.484945 Torr and NaOH valve is open.  Emergency exit.
4/14/2011	12:42:59 PM	Run aborted at 12:42 PM
4/14/2011	12:44:08 PM	Recipe started at 12:44 PM
4/14/2011	12:44:08 PM	Helium valve closed
4/14/2011	12:44:08 PM	BCl3 valve closed
4/14/2011	12:44:08 PM	PH3 valve closed
4/14/2011	12:44:08 PM	SiCl4 pre valve closed
4/14/2011	12:44:08 PM	SiCl4 post valve closed
4/14/2011	12:44:08 PM	Main Vac valve closed
4/14/2011	12:44:08 PM	Bypass valve closed
4/14/2011	12:44:08 PM	Bubbler valve closed
4/14/2011	12:44:08 PM	H2 valve opened
4/14/2011	12:44:08 PM	Helium MFC set to  0.000000
4/14/2011	12:44:08 PM	H2 MFC set to  500.000000
4/14/2011	12:44:08 PM	BCl3 MFC set to  0.000000
4/14/2011	12:44:08 PM	PHl3 MFC set to  0.000000
4/14/2011	12:44:08 PM	SiCl4 MFC set to  0.000000
4/14/2011	12:44:08 PM	Bypass solenoid MFC set to  0.000000
4/14/2011	12:44:09 PM	Tube furnace set to 0
4/14/2011	12:44:11 PM	Helium valve closed
4/14/2011	12:44:11 PM	BCl3 valve closed
4/14/2011	12:44:11 PM	PH3 valve closed
4/14/2011	12:44:11 PM	SiCl4 pre valve closed
4/14/2011	12:44:11 PM	SiCl4 post valve closed
4/14/2011	12:44:11 PM	Main Vac valve closed
4/14/2011	12:44:11 PM	Bypass valve closed
4/14/2011	12:44:11 PM	H2 valve opened
4/14/2011	12:44:11 PM	Bubbler valve opened
4/14/2011	12:44:11 PM	Helium MFC set to  0.000000
4/14/2011	12:44:11 PM	H2 MFC set to  500.000000
4/14/2011	12:44:11 PM	BCl3 MFC set to  0.000000
4/14/2011	12:44:11 PM	PHl3 MFC set to  0.000000
4/14/2011	12:44:11 PM	SiCl4 MFC set to  0.000000
4/14/2011	12:44:11 PM	Bypass solenoid MFC set to  0.000000
4/14/2011	12:44:11 PM	Tube furnace set to 1000
4/14/2011	12:44:12 PM	Helium valve closed
4/14/2011	12:44:12 PM	H2 valve closed
4/14/2011	12:44:12 PM	BCl3 valve closed
4/14/2011	12:44:12 PM	PH3 valve closed
4/14/2011	12:44:12 PM	SiCl4 pre valve closed
4/14/2011	12:44:12 PM	SiCl4 post valve closed
4/14/2011	12:44:12 PM	Main Vac valve closed
4/14/2011	12:44:12 PM	Bubbler valve closed
4/14/2011	12:44:12 PM	Bypass valve closed
4/14/2011	12:44:12 PM	Helium MFC set to  0.000000
4/14/2011	12:44:12 PM	H2 MFC set to  0.000000
4/14/2011	12:44:12 PM	BCl3 MFC set to  0.000000
4/14/2011	12:44:12 PM	PHl3 MFC set to  0.000000
4/14/2011	12:44:12 PM	SiCl4 MFC set to  0.000000
4/14/2011	12:44:12 PM	Bypass solenoid MFC set to  760.000000
4/14/2011	12:44:12 PM	Tube furnace set to 0
4/14/2011	12:44:12 PM	Baratron reads 747.443289 Torr and NaOH valve is open.  Emergency exit.
4/14/2011	12:44:19 PM	Run aborted at 12:44 PM
4/14/2011	12:44:39 PM	Recipe started at 12:44 PM
4/14/2011	12:44:39 PM	Helium valve closed
4/14/2011	12:44:39 PM	BCl3 valve closed
4/14/2011	12:44:39 PM	PH3 valve closed
4/14/2011	12:44:39 PM	SiCl4 pre valve closed
4/14/2011	12:44:39 PM	SiCl4 post valve closed
4/14/2011	12:44:39 PM	Main Vac valve closed
4/14/2011	12:44:39 PM	Bypass valve closed
4/14/2011	12:44:39 PM	Bubbler valve closed
4/14/2011	12:44:39 PM	H2 valve opened
4/14/2011	12:44:39 PM	Helium MFC set to  0.000000
4/14/2011	12:44:39 PM	H2 MFC set to  500.000000
4/14/2011	12:44:39 PM	BCl3 MFC set to  0.000000
4/14/2011	12:44:39 PM	PHl3 MFC set to  0.000000
4/14/2011	12:44:39 PM	SiCl4 MFC set to  0.000000
4/14/2011	12:44:39 PM	Bypass solenoid MFC set to  0.000000
4/14/2011	12:44:39 PM	Tube furnace set to 0
4/14/2011	12:44:42 PM	Helium valve closed
4/14/2011	12:44:42 PM	BCl3 valve closed
4/14/2011	12:44:42 PM	PH3 valve closed
4/14/2011	12:44:42 PM	SiCl4 pre valve closed
4/14/2011	12:44:42 PM	SiCl4 post valve closed
4/14/2011	12:44:42 PM	Main Vac valve closed
4/14/2011	12:44:42 PM	Bypass valve closed
4/14/2011	12:44:42 PM	H2 valve opened
4/14/2011	12:44:42 PM	Bubbler valve opened
4/14/2011	12:44:42 PM	Helium MFC set to  0.000000
4/14/2011	12:44:42 PM	H2 MFC set to  500.000000
4/14/2011	12:44:42 PM	BCl3 MFC set to  0.000000
4/14/2011	12:44:42 PM	PHl3 MFC set to  0.000000
4/14/2011	12:44:42 PM	SiCl4 MFC set to  0.000000
4/14/2011	12:44:42 PM	Bypass solenoid MFC set to  0.000000
4/14/2011	12:44:42 PM	Tube furnace set to 1000
4/14/2011	1:04:42 PM	Helium valve closed
4/14/2011	1:04:42 PM	BCl3 valve closed
4/14/2011	1:04:42 PM	PH3 valve closed
4/14/2011	1:04:42 PM	SiCl4 pre valve closed
4/14/2011	1:04:42 PM	SiCl4 post valve closed
4/14/2011	1:04:42 PM	Main Vac valve closed
4/14/2011	1:04:42 PM	Bypass valve closed
4/14/2011	1:04:42 PM	H2 valve opened
4/14/2011	1:04:42 PM	Bubbler valve opened
4/14/2011	1:04:42 PM	Helium MFC set to  0.000000
4/14/2011	1:04:42 PM	H2 MFC set to  500.000000
4/14/2011	1:04:42 PM	BCl3 MFC set to  0.000000
4/14/2011	1:04:42 PM	PHl3 MFC set to  0.000000
4/14/2011	1:04:42 PM	SiCl4 MFC set to  0.000000
4/14/2011	1:04:42 PM	Bypass solenoid MFC set to  0.000000
4/14/2011	1:04:42 PM	Tube furnace set to 1000
4/14/2011	1:04:43 PM	H2 valve closed
4/14/2011	1:04:43 PM	BCl3 valve closed
4/14/2011	1:04:43 PM	PH3 valve closed
4/14/2011	1:04:43 PM	SiCl4 pre valve closed
4/14/2011	1:04:43 PM	SiCl4 post valve closed
4/14/2011	1:04:43 PM	Main Vac valve closed
4/14/2011	1:04:43 PM	Bypass valve closed
4/14/2011	1:04:43 PM	Helium valve opened
4/14/2011	1:04:43 PM	Bubbler valve opened
4/14/2011	1:04:43 PM	Helium MFC set to  500.000000
4/14/2011	1:04:43 PM	H2 MFC set to  0.000000
4/14/2011	1:04:43 PM	BCl3 MFC set to  0.000000
4/14/2011	1:04:43 PM	PHl3 MFC set to  0.000000
4/14/2011	1:04:43 PM	SiCl4 MFC set to  0.000000
4/14/2011	1:04:43 PM	Bypass solenoid MFC set to  0.000000
4/14/2011	1:04:43 PM	Tube furnace set to 0
4/14/2011	1:24:43 PM	Helium valve closed
4/14/2011	1:24:43 PM	H2 valve closed
4/14/2011	1:24:43 PM	BCl3 valve closed
4/14/2011	1:24:43 PM	PH3 valve closed
4/14/2011	1:24:43 PM	SiCl4 pre valve closed
4/14/2011	1:24:43 PM	SiCl4 post valve closed
4/14/2011	1:24:43 PM	Main Vac valve closed
4/14/2011	1:24:43 PM	Bypass valve closed
4/14/2011	1:24:43 PM	Bubbler valve closed
4/14/2011	1:24:43 PM	Helium MFC set to  0.000000
4/14/2011	1:24:43 PM	H2 MFC set to  0.000000
4/14/2011	1:24:43 PM	BCl3 MFC set to  0.000000
4/14/2011	1:24:43 PM	PHl3 MFC set to  0.000000
4/14/2011	1:24:43 PM	SiCl4 MFC set to  0.000000
4/14/2011	1:24:43 PM	Bypass solenoid MFC set to  0.000000
4/14/2011	1:24:43 PM	Tube furnace set to 0
4/14/2011	1:24:44 PM	Run finished at 1:24 PM
4/14/2011	3:45:10 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/14/2011	3:45:11 PM	Recipe started at 3:45 PM
4/14/2011	3:45:11 PM	H2 valve closed
4/14/2011	3:45:11 PM	BCl3 valve closed
4/14/2011	3:45:11 PM	PH3 valve closed
4/14/2011	3:45:11 PM	SiCl4 pre valve closed
4/14/2011	3:45:11 PM	SiCl4 post valve closed
4/14/2011	3:45:11 PM	Main Vac valve closed
4/14/2011	3:45:11 PM	Bypass valve closed
4/14/2011	3:45:11 PM	Bubbler valve closed
4/14/2011	3:45:11 PM	Helium valve opened
4/14/2011	3:45:11 PM	Helium MFC set to  500.000000
4/14/2011	3:45:11 PM	H2 MFC set to  0.000000
4/14/2011	3:45:11 PM	BCl3 MFC set to  0.000000
4/14/2011	3:45:11 PM	PHl3 MFC set to  0.000000
4/14/2011	3:45:11 PM	SiCl4 MFC set to  0.000000
4/14/2011	3:45:11 PM	Bypass solenoid MFC set to  0.000000
4/14/2011	3:45:11 PM	Tube furnace set to 0
4/14/2011	3:45:19 PM	Helium valve closed
4/14/2011	3:45:19 PM	H2 valve closed
4/14/2011	3:45:19 PM	BCl3 valve closed
4/14/2011	3:45:19 PM	PH3 valve closed
4/14/2011	3:45:19 PM	SiCl4 pre valve closed
4/14/2011	3:45:19 PM	SiCl4 post valve closed
4/14/2011	3:45:19 PM	Main Vac valve closed
4/14/2011	3:45:19 PM	Bypass valve closed
4/14/2011	3:45:19 PM	Bubbler valve closed
4/14/2011	3:45:19 PM	Helium MFC set to  0.000000
4/14/2011	3:45:19 PM	H2 MFC set to  0.000000
4/14/2011	3:45:19 PM	BCl3 MFC set to  0.000000
4/14/2011	3:45:19 PM	PHl3 MFC set to  0.000000
4/14/2011	3:45:19 PM	SiCl4 MFC set to  0.000000
4/14/2011	3:45:19 PM	Bypass solenoid MFC set to  0.000000
4/14/2011	3:45:19 PM	Tube furnace set to 0
4/14/2011	3:45:19 PM	Run finished at 3:45 PM
4/14/2011	3:45:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/14/2011	3:51:33 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/14/2011	3:51:34 PM	Recipe started at 3:51 PM
4/14/2011	3:51:34 PM	Helium valve closed
4/14/2011	3:51:34 PM	H2 valve closed
4/14/2011	3:51:34 PM	BCl3 valve closed
4/14/2011	3:51:34 PM	PH3 valve closed
4/14/2011	3:51:34 PM	SiCl4 pre valve closed
4/14/2011	3:51:34 PM	SiCl4 post valve closed
4/14/2011	3:51:34 PM	Main Vac valve closed
4/14/2011	3:51:34 PM	Bubbler valve closed
4/14/2011	3:51:34 PM	Bypass valve opened
4/14/2011	3:51:34 PM	Helium MFC set to  0.000000
4/14/2011	3:51:34 PM	H2 MFC set to  0.000000
4/14/2011	3:51:34 PM	BCl3 MFC set to  0.000000
4/14/2011	3:51:34 PM	PHl3 MFC set to  0.000000
4/14/2011	3:51:34 PM	SiCl4 MFC set to  0.000000
4/14/2011	3:51:34 PM	Bypass solenoid MFC set to  0.000000
4/14/2011	3:51:34 PM	Tube furnace set to 0
4/14/2011	3:52:05 PM	Helium valve closed
4/14/2011	3:52:05 PM	H2 valve closed
4/14/2011	3:52:05 PM	BCl3 valve closed
4/14/2011	3:52:05 PM	PH3 valve closed
4/14/2011	3:52:05 PM	SiCl4 pre valve closed
4/14/2011	3:52:05 PM	SiCl4 post valve closed
4/14/2011	3:52:05 PM	Bubbler valve closed
4/14/2011	3:52:05 PM	Main Vac valve opened
4/14/2011	3:52:05 PM	Bypass valve opened
4/14/2011	3:52:05 PM	Helium MFC set to  0.000000
4/14/2011	3:52:05 PM	H2 MFC set to  0.000000
4/14/2011	3:52:05 PM	BCl3 MFC set to  0.000000
4/14/2011	3:52:05 PM	PHl3 MFC set to  0.000000
4/14/2011	3:52:05 PM	SiCl4 MFC set to  0.000000
4/14/2011	3:52:05 PM	Bypass solenoid MFC set to  0.000000
4/14/2011	3:52:05 PM	Tube furnace set to 0
4/14/2011	3:52:05 PM	Run finished at 3:52 PM
4/14/2011	3:52:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/14/2011	3:54:54 PM	Tube furnace set to 300
4/14/2011	3:58:25 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
4/14/2011	3:58:36 PM	Recipe started at 3:58 PM
4/14/2011	3:58:36 PM	Helium valve closed
4/14/2011	3:58:36 PM	H2 valve closed
4/14/2011	3:58:36 PM	BCl3 valve closed
4/14/2011	3:58:36 PM	PH3 valve closed
4/14/2011	3:58:36 PM	SiCl4 pre valve closed
4/14/2011	3:58:36 PM	SiCl4 post valve closed
4/14/2011	3:58:36 PM	Main Vac valve closed
4/14/2011	3:58:36 PM	Bubbler valve closed
4/14/2011	3:58:36 PM	Bypass valve opened
4/14/2011	3:58:36 PM	Helium MFC set to  0.000000
4/14/2011	3:58:36 PM	H2 MFC set to  0.000000
4/14/2011	3:58:36 PM	BCl3 MFC set to  0.000000
4/14/2011	3:58:36 PM	PHl3 MFC set to  0.000000
4/14/2011	3:58:36 PM	SiCl4 MFC set to  0.000000
4/14/2011	3:58:36 PM	Bypass solenoid MFC set to  0.000000
4/14/2011	3:58:37 PM	Tube furnace set to 0
4/14/2011	3:58:37 PM	Helium valve closed
4/14/2011	3:58:37 PM	H2 valve closed
4/14/2011	3:58:37 PM	BCl3 valve closed
4/14/2011	3:58:37 PM	PH3 valve closed
4/14/2011	3:58:37 PM	SiCl4 pre valve closed
4/14/2011	3:58:37 PM	SiCl4 post valve closed
4/14/2011	3:58:37 PM	Bubbler valve closed
4/14/2011	3:58:37 PM	Main Vac valve opened
4/14/2011	3:58:37 PM	Bypass valve opened
4/14/2011	3:58:37 PM	Helium MFC set to  0.000000
4/14/2011	3:58:37 PM	H2 MFC set to  0.000000
4/14/2011	3:58:37 PM	BCl3 MFC set to  0.000000
4/14/2011	3:58:37 PM	PHl3 MFC set to  0.000000
4/14/2011	3:58:37 PM	SiCl4 MFC set to  0.000000
4/14/2011	3:58:37 PM	Bypass solenoid MFC set to  0.000000
4/14/2011	3:58:37 PM	Tube furnace set to 0
4/14/2011	3:59:37 PM	H2 valve closed
4/14/2011	3:59:37 PM	BCl3 valve closed
4/14/2011	3:59:37 PM	PH3 valve closed
4/14/2011	3:59:37 PM	SiCl4 pre valve closed
4/14/2011	3:59:37 PM	SiCl4 post valve closed
4/14/2011	3:59:37 PM	Bubbler valve closed
4/14/2011	3:59:37 PM	Helium valve opened
4/14/2011	3:59:37 PM	Main Vac valve opened
4/14/2011	3:59:37 PM	Bypass valve opened
4/14/2011	3:59:37 PM	Helium MFC set to  100.000000
4/14/2011	3:59:37 PM	H2 MFC set to  0.000000
4/14/2011	3:59:37 PM	BCl3 MFC set to  0.000000
4/14/2011	3:59:37 PM	PHl3 MFC set to  0.000000
4/14/2011	3:59:37 PM	SiCl4 MFC set to  0.000000
4/14/2011	3:59:37 PM	Bypass solenoid MFC set to  0.000000
4/14/2011	3:59:37 PM	Tube furnace set to 0
4/14/2011	4:00:37 PM	Helium valve closed
4/14/2011	4:00:37 PM	H2 valve closed
4/14/2011	4:00:37 PM	BCl3 valve closed
4/14/2011	4:00:37 PM	PH3 valve closed
4/14/2011	4:00:37 PM	SiCl4 pre valve closed
4/14/2011	4:00:37 PM	SiCl4 post valve closed
4/14/2011	4:00:37 PM	Bubbler valve closed
4/14/2011	4:00:37 PM	Main Vac valve opened
4/14/2011	4:00:37 PM	Bypass valve opened
4/14/2011	4:00:37 PM	Helium MFC set to  0.000000
4/14/2011	4:00:37 PM	H2 MFC set to  0.000000
4/14/2011	4:00:37 PM	BCl3 MFC set to  0.000000
4/14/2011	4:00:37 PM	PHl3 MFC set to  0.000000
4/14/2011	4:00:37 PM	SiCl4 MFC set to  0.000000
4/14/2011	4:00:37 PM	Bypass solenoid MFC set to  0.000000
4/14/2011	4:00:37 PM	Tube furnace set to 0
4/14/2011	4:01:37 PM	H2 valve closed
4/14/2011	4:01:37 PM	BCl3 valve closed
4/14/2011	4:01:37 PM	PH3 valve closed
4/14/2011	4:01:37 PM	SiCl4 pre valve closed
4/14/2011	4:01:37 PM	SiCl4 post valve closed
4/14/2011	4:01:37 PM	Bubbler valve closed
4/14/2011	4:01:37 PM	Helium valve opened
4/14/2011	4:01:37 PM	Main Vac valve opened
4/14/2011	4:01:37 PM	Bypass valve opened
4/14/2011	4:01:37 PM	Helium MFC set to  100.000000
4/14/2011	4:01:37 PM	H2 MFC set to  0.000000
4/14/2011	4:01:37 PM	BCl3 MFC set to  0.000000
4/14/2011	4:01:37 PM	PHl3 MFC set to  0.000000
4/14/2011	4:01:37 PM	SiCl4 MFC set to  0.000000
4/14/2011	4:01:37 PM	Bypass solenoid MFC set to  0.000000
4/14/2011	4:01:38 PM	Tube furnace set to 0
4/14/2011	4:02:38 PM	Helium valve closed
4/14/2011	4:02:38 PM	H2 valve closed
4/14/2011	4:02:38 PM	BCl3 valve closed
4/14/2011	4:02:38 PM	PH3 valve closed
4/14/2011	4:02:38 PM	SiCl4 pre valve closed
4/14/2011	4:02:38 PM	SiCl4 post valve closed
4/14/2011	4:02:38 PM	Bubbler valve closed
4/14/2011	4:02:38 PM	Main Vac valve opened
4/14/2011	4:02:38 PM	Bypass valve opened
4/14/2011	4:02:38 PM	Helium MFC set to  0.000000
4/14/2011	4:02:38 PM	H2 MFC set to  0.000000
4/14/2011	4:02:38 PM	BCl3 MFC set to  0.000000
4/14/2011	4:02:38 PM	PHl3 MFC set to  0.000000
4/14/2011	4:02:38 PM	SiCl4 MFC set to  0.000000
4/14/2011	4:02:38 PM	Bypass solenoid MFC set to  0.000000
4/14/2011	4:02:38 PM	Tube furnace set to 0
4/14/2011	4:03:38 PM	H2 valve closed
4/14/2011	4:03:38 PM	BCl3 valve closed
4/14/2011	4:03:38 PM	PH3 valve closed
4/14/2011	4:03:38 PM	SiCl4 pre valve closed
4/14/2011	4:03:38 PM	SiCl4 post valve closed
4/14/2011	4:03:38 PM	Bubbler valve closed
4/14/2011	4:03:38 PM	Helium valve opened
4/14/2011	4:03:38 PM	Main Vac valve opened
4/14/2011	4:03:38 PM	Bypass valve opened
4/14/2011	4:03:38 PM	Helium MFC set to  100.000000
4/14/2011	4:03:38 PM	H2 MFC set to  0.000000
4/14/2011	4:03:38 PM	BCl3 MFC set to  0.000000
4/14/2011	4:03:38 PM	PHl3 MFC set to  0.000000
4/14/2011	4:03:38 PM	SiCl4 MFC set to  0.000000
4/14/2011	4:03:38 PM	Bypass solenoid MFC set to  0.000000
4/14/2011	4:03:38 PM	Tube furnace set to 0
4/14/2011	4:04:38 PM	Helium valve closed
4/14/2011	4:04:38 PM	H2 valve closed
4/14/2011	4:04:38 PM	BCl3 valve closed
4/14/2011	4:04:38 PM	PH3 valve closed
4/14/2011	4:04:38 PM	SiCl4 pre valve closed
4/14/2011	4:04:38 PM	SiCl4 post valve closed
4/14/2011	4:04:38 PM	Bubbler valve closed
4/14/2011	4:04:38 PM	Main Vac valve opened
4/14/2011	4:04:38 PM	Bypass valve opened
4/14/2011	4:04:38 PM	Helium MFC set to  0.000000
4/14/2011	4:04:38 PM	H2 MFC set to  0.000000
4/14/2011	4:04:38 PM	BCl3 MFC set to  0.000000
4/14/2011	4:04:38 PM	PHl3 MFC set to  0.000000
4/14/2011	4:04:38 PM	SiCl4 MFC set to  0.000000
4/14/2011	4:04:38 PM	Bypass solenoid MFC set to  0.000000
4/14/2011	4:04:38 PM	Tube furnace set to 0
4/14/2011	4:05:38 PM	H2 valve closed
4/14/2011	4:05:38 PM	BCl3 valve closed
4/14/2011	4:05:38 PM	PH3 valve closed
4/14/2011	4:05:38 PM	SiCl4 pre valve closed
4/14/2011	4:05:38 PM	SiCl4 post valve closed
4/14/2011	4:05:38 PM	Bubbler valve closed
4/14/2011	4:05:38 PM	Helium valve opened
4/14/2011	4:05:38 PM	Main Vac valve opened
4/14/2011	4:05:38 PM	Bypass valve opened
4/14/2011	4:05:38 PM	Helium MFC set to  100.000000
4/14/2011	4:05:38 PM	H2 MFC set to  0.000000
4/14/2011	4:05:38 PM	BCl3 MFC set to  0.000000
4/14/2011	4:05:38 PM	PHl3 MFC set to  0.000000
4/14/2011	4:05:38 PM	SiCl4 MFC set to  0.000000
4/14/2011	4:05:38 PM	Bypass solenoid MFC set to  0.000000
4/14/2011	4:05:38 PM	Tube furnace set to 0
4/14/2011	4:06:38 PM	Helium valve closed
4/14/2011	4:06:38 PM	H2 valve closed
4/14/2011	4:06:38 PM	BCl3 valve closed
4/14/2011	4:06:38 PM	PH3 valve closed
4/14/2011	4:06:38 PM	SiCl4 pre valve closed
4/14/2011	4:06:38 PM	SiCl4 post valve closed
4/14/2011	4:06:38 PM	Bubbler valve closed
4/14/2011	4:06:38 PM	Main Vac valve opened
4/14/2011	4:06:38 PM	Bypass valve opened
4/14/2011	4:06:38 PM	Helium MFC set to  0.000000
4/14/2011	4:06:38 PM	H2 MFC set to  0.000000
4/14/2011	4:06:38 PM	BCl3 MFC set to  0.000000
4/14/2011	4:06:38 PM	PHl3 MFC set to  0.000000
4/14/2011	4:06:38 PM	SiCl4 MFC set to  0.000000
4/14/2011	4:06:38 PM	Bypass solenoid MFC set to  0.000000
4/14/2011	4:06:39 PM	Tube furnace set to 0
4/14/2011	4:07:39 PM	H2 valve closed
4/14/2011	4:07:39 PM	BCl3 valve closed
4/14/2011	4:07:39 PM	PH3 valve closed
4/14/2011	4:07:39 PM	SiCl4 pre valve closed
4/14/2011	4:07:39 PM	SiCl4 post valve closed
4/14/2011	4:07:39 PM	Bubbler valve closed
4/14/2011	4:07:39 PM	Helium valve opened
4/14/2011	4:07:39 PM	Main Vac valve opened
4/14/2011	4:07:39 PM	Bypass valve opened
4/14/2011	4:07:39 PM	Helium MFC set to  100.000000
4/14/2011	4:07:39 PM	H2 MFC set to  0.000000
4/14/2011	4:07:39 PM	BCl3 MFC set to  0.000000
4/14/2011	4:07:39 PM	PHl3 MFC set to  0.000000
4/14/2011	4:07:39 PM	SiCl4 MFC set to  0.000000
4/14/2011	4:07:39 PM	Bypass solenoid MFC set to  0.000000
4/14/2011	4:07:39 PM	Tube furnace set to 0
4/14/2011	4:08:39 PM	Helium valve closed
4/14/2011	4:08:39 PM	H2 valve closed
4/14/2011	4:08:39 PM	BCl3 valve closed
4/14/2011	4:08:39 PM	PH3 valve closed
4/14/2011	4:08:39 PM	SiCl4 pre valve closed
4/14/2011	4:08:39 PM	SiCl4 post valve closed
4/14/2011	4:08:39 PM	Bubbler valve closed
4/14/2011	4:08:39 PM	Main Vac valve opened
4/14/2011	4:08:39 PM	Bypass valve opened
4/14/2011	4:08:39 PM	Helium MFC set to  0.000000
4/14/2011	4:08:39 PM	H2 MFC set to  0.000000
4/14/2011	4:08:39 PM	BCl3 MFC set to  0.000000
4/14/2011	4:08:39 PM	PHl3 MFC set to  0.000000
4/14/2011	4:08:39 PM	SiCl4 MFC set to  0.000000
4/14/2011	4:08:39 PM	Bypass solenoid MFC set to  0.000000
4/14/2011	4:08:39 PM	Tube furnace set to 0
4/14/2011	4:09:39 PM	H2 valve closed
4/14/2011	4:09:39 PM	BCl3 valve closed
4/14/2011	4:09:39 PM	PH3 valve closed
4/14/2011	4:09:39 PM	SiCl4 pre valve closed
4/14/2011	4:09:39 PM	SiCl4 post valve closed
4/14/2011	4:09:39 PM	Bubbler valve closed
4/14/2011	4:09:39 PM	Helium valve opened
4/14/2011	4:09:39 PM	Main Vac valve opened
4/14/2011	4:09:39 PM	Bypass valve opened
4/14/2011	4:09:39 PM	Helium MFC set to  100.000000
4/14/2011	4:09:39 PM	H2 MFC set to  0.000000
4/14/2011	4:09:39 PM	BCl3 MFC set to  0.000000
4/14/2011	4:09:39 PM	PHl3 MFC set to  0.000000
4/14/2011	4:09:39 PM	SiCl4 MFC set to  0.000000
4/14/2011	4:09:39 PM	Bypass solenoid MFC set to  0.000000
4/14/2011	4:09:39 PM	Tube furnace set to 0
4/14/2011	4:10:39 PM	Helium valve closed
4/14/2011	4:10:39 PM	H2 valve closed
4/14/2011	4:10:39 PM	BCl3 valve closed
4/14/2011	4:10:39 PM	PH3 valve closed
4/14/2011	4:10:39 PM	SiCl4 pre valve closed
4/14/2011	4:10:39 PM	SiCl4 post valve closed
4/14/2011	4:10:39 PM	Bubbler valve closed
4/14/2011	4:10:39 PM	Main Vac valve opened
4/14/2011	4:10:39 PM	Bypass valve opened
4/14/2011	4:10:39 PM	Helium MFC set to  0.000000
4/14/2011	4:10:39 PM	H2 MFC set to  0.000000
4/14/2011	4:10:39 PM	BCl3 MFC set to  0.000000
4/14/2011	4:10:39 PM	PHl3 MFC set to  0.000000
4/14/2011	4:10:39 PM	SiCl4 MFC set to  0.000000
4/14/2011	4:10:39 PM	Bypass solenoid MFC set to  0.000000
4/14/2011	4:10:39 PM	Tube furnace set to 0
4/14/2011	4:11:39 PM	H2 valve closed
4/14/2011	4:11:39 PM	BCl3 valve closed
4/14/2011	4:11:39 PM	PH3 valve closed
4/14/2011	4:11:39 PM	SiCl4 pre valve closed
4/14/2011	4:11:39 PM	SiCl4 post valve closed
4/14/2011	4:11:39 PM	Bubbler valve closed
4/14/2011	4:11:39 PM	Helium valve opened
4/14/2011	4:11:39 PM	Main Vac valve opened
4/14/2011	4:11:39 PM	Bypass valve opened
4/14/2011	4:11:39 PM	Helium MFC set to  100.000000
4/14/2011	4:11:39 PM	H2 MFC set to  0.000000
4/14/2011	4:11:39 PM	BCl3 MFC set to  0.000000
4/14/2011	4:11:39 PM	PHl3 MFC set to  0.000000
4/14/2011	4:11:39 PM	SiCl4 MFC set to  0.000000
4/14/2011	4:11:39 PM	Bypass solenoid MFC set to  0.000000
4/14/2011	4:11:40 PM	Tube furnace set to 0
4/14/2011	4:12:40 PM	Helium valve closed
4/14/2011	4:12:40 PM	H2 valve closed
4/14/2011	4:12:40 PM	BCl3 valve closed
4/14/2011	4:12:40 PM	PH3 valve closed
4/14/2011	4:12:40 PM	SiCl4 pre valve closed
4/14/2011	4:12:40 PM	SiCl4 post valve closed
4/14/2011	4:12:40 PM	Bubbler valve closed
4/14/2011	4:12:40 PM	Main Vac valve opened
4/14/2011	4:12:40 PM	Bypass valve opened
4/14/2011	4:12:40 PM	Helium MFC set to  0.000000
4/14/2011	4:12:40 PM	H2 MFC set to  0.000000
4/14/2011	4:12:40 PM	BCl3 MFC set to  0.000000
4/14/2011	4:12:40 PM	PHl3 MFC set to  0.000000
4/14/2011	4:12:40 PM	SiCl4 MFC set to  0.000000
4/14/2011	4:12:40 PM	Bypass solenoid MFC set to  0.000000
4/14/2011	4:12:40 PM	Tube furnace set to 0
4/14/2011	4:13:40 PM	H2 valve closed
4/14/2011	4:13:40 PM	BCl3 valve closed
4/14/2011	4:13:40 PM	PH3 valve closed
4/14/2011	4:13:40 PM	SiCl4 pre valve closed
4/14/2011	4:13:40 PM	SiCl4 post valve closed
4/14/2011	4:13:40 PM	Bubbler valve closed
4/14/2011	4:13:40 PM	Helium valve opened
4/14/2011	4:13:40 PM	Main Vac valve opened
4/14/2011	4:13:40 PM	Bypass valve opened
4/14/2011	4:13:40 PM	Helium MFC set to  100.000000
4/14/2011	4:13:40 PM	H2 MFC set to  0.000000
4/14/2011	4:13:40 PM	BCl3 MFC set to  0.000000
4/14/2011	4:13:40 PM	PHl3 MFC set to  0.000000
4/14/2011	4:13:40 PM	SiCl4 MFC set to  0.000000
4/14/2011	4:13:40 PM	Bypass solenoid MFC set to  0.000000
4/14/2011	4:13:40 PM	Tube furnace set to 0
4/14/2011	4:14:40 PM	Helium valve closed
4/14/2011	4:14:40 PM	H2 valve closed
4/14/2011	4:14:40 PM	BCl3 valve closed
4/14/2011	4:14:40 PM	PH3 valve closed
4/14/2011	4:14:40 PM	SiCl4 pre valve closed
4/14/2011	4:14:40 PM	SiCl4 post valve closed
4/14/2011	4:14:40 PM	Bubbler valve closed
4/14/2011	4:14:40 PM	Main Vac valve opened
4/14/2011	4:14:40 PM	Bypass valve opened
4/14/2011	4:14:40 PM	Helium MFC set to  0.000000
4/14/2011	4:14:40 PM	H2 MFC set to  0.000000
4/14/2011	4:14:40 PM	BCl3 MFC set to  0.000000
4/14/2011	4:14:40 PM	PHl3 MFC set to  0.000000
4/14/2011	4:14:40 PM	SiCl4 MFC set to  0.000000
4/14/2011	4:14:40 PM	Bypass solenoid MFC set to  0.000000
4/14/2011	4:14:40 PM	Tube furnace set to 0
4/14/2011	4:15:40 PM	H2 valve closed
4/14/2011	4:15:40 PM	BCl3 valve closed
4/14/2011	4:15:40 PM	PH3 valve closed
4/14/2011	4:15:40 PM	SiCl4 pre valve closed
4/14/2011	4:15:40 PM	SiCl4 post valve closed
4/14/2011	4:15:40 PM	Bubbler valve closed
4/14/2011	4:15:40 PM	Helium valve opened
4/14/2011	4:15:40 PM	Main Vac valve opened
4/14/2011	4:15:40 PM	Bypass valve opened
4/14/2011	4:15:40 PM	Helium MFC set to  100.000000
4/14/2011	4:15:40 PM	H2 MFC set to  0.000000
4/14/2011	4:15:40 PM	BCl3 MFC set to  0.000000
4/14/2011	4:15:40 PM	PHl3 MFC set to  0.000000
4/14/2011	4:15:40 PM	SiCl4 MFC set to  0.000000
4/14/2011	4:15:40 PM	Bypass solenoid MFC set to  0.000000
4/14/2011	4:15:40 PM	Tube furnace set to 0
4/14/2011	4:16:40 PM	Helium valve closed
4/14/2011	4:16:40 PM	H2 valve closed
4/14/2011	4:16:40 PM	BCl3 valve closed
4/14/2011	4:16:40 PM	PH3 valve closed
4/14/2011	4:16:40 PM	SiCl4 pre valve closed
4/14/2011	4:16:40 PM	SiCl4 post valve closed
4/14/2011	4:16:40 PM	Bubbler valve closed
4/14/2011	4:16:40 PM	Main Vac valve opened
4/14/2011	4:16:40 PM	Bypass valve opened
4/14/2011	4:16:40 PM	Helium MFC set to  0.000000
4/14/2011	4:16:40 PM	H2 MFC set to  0.000000
4/14/2011	4:16:40 PM	BCl3 MFC set to  0.000000
4/14/2011	4:16:40 PM	PHl3 MFC set to  0.000000
4/14/2011	4:16:40 PM	SiCl4 MFC set to  0.000000
4/14/2011	4:16:40 PM	Bypass solenoid MFC set to  0.000000
4/14/2011	4:16:41 PM	Tube furnace set to 0
4/14/2011	4:17:41 PM	H2 valve closed
4/14/2011	4:17:41 PM	BCl3 valve closed
4/14/2011	4:17:41 PM	PH3 valve closed
4/14/2011	4:17:41 PM	SiCl4 pre valve closed
4/14/2011	4:17:41 PM	SiCl4 post valve closed
4/14/2011	4:17:41 PM	Bubbler valve closed
4/14/2011	4:17:41 PM	Helium valve opened
4/14/2011	4:17:41 PM	Main Vac valve opened
4/14/2011	4:17:41 PM	Bypass valve opened
4/14/2011	4:17:41 PM	Helium MFC set to  100.000000
4/14/2011	4:17:41 PM	H2 MFC set to  0.000000
4/14/2011	4:17:41 PM	BCl3 MFC set to  0.000000
4/14/2011	4:17:41 PM	PHl3 MFC set to  0.000000
4/14/2011	4:17:41 PM	SiCl4 MFC set to  0.000000
4/14/2011	4:17:41 PM	Bypass solenoid MFC set to  0.000000
4/14/2011	4:17:41 PM	Tube furnace set to 0
4/14/2011	4:18:41 PM	Helium valve closed
4/14/2011	4:18:41 PM	H2 valve closed
4/14/2011	4:18:41 PM	BCl3 valve closed
4/14/2011	4:18:41 PM	PH3 valve closed
4/14/2011	4:18:41 PM	SiCl4 pre valve closed
4/14/2011	4:18:41 PM	SiCl4 post valve closed
4/14/2011	4:18:41 PM	Bubbler valve closed
4/14/2011	4:18:41 PM	Main Vac valve opened
4/14/2011	4:18:41 PM	Bypass valve opened
4/14/2011	4:18:41 PM	Helium MFC set to  0.000000
4/14/2011	4:18:41 PM	H2 MFC set to  0.000000
4/14/2011	4:18:41 PM	BCl3 MFC set to  0.000000
4/14/2011	4:18:41 PM	PHl3 MFC set to  0.000000
4/14/2011	4:18:41 PM	SiCl4 MFC set to  0.000000
4/14/2011	4:18:41 PM	Bypass solenoid MFC set to  0.000000
4/14/2011	4:18:41 PM	Tube furnace set to 0
4/14/2011	4:18:42 PM	Run finished at 4:18 PM
4/14/2011	4:18:42 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
4/14/2011	4:45:49 PM	Helium valve opened
4/14/2011	4:45:53 PM	Helium MFC set to  100.000000
4/14/2011	4:46:38 PM	Helium MFC set to  0.000000
4/14/2011	4:46:41 PM	Helium valve closed
4/14/2011	4:47:36 PM	Recipe started at 4:47 PM
4/14/2011	4:47:36 PM	Helium valve closed
4/14/2011	4:47:36 PM	BCl3 valve closed
4/14/2011	4:47:36 PM	PH3 valve closed
4/14/2011	4:47:36 PM	SiCl4 pre valve closed
4/14/2011	4:47:36 PM	SiCl4 post valve closed
4/14/2011	4:47:36 PM	Main Vac valve closed
4/14/2011	4:47:36 PM	Bypass valve closed
4/14/2011	4:47:36 PM	Bubbler valve closed
4/14/2011	4:47:36 PM	H2 valve opened
4/14/2011	4:47:36 PM	Helium MFC set to  0.000000
4/14/2011	4:47:36 PM	H2 MFC set to  500.000000
4/14/2011	4:47:36 PM	BCl3 MFC set to  0.000000
4/14/2011	4:47:36 PM	PHl3 MFC set to  0.000000
4/14/2011	4:47:36 PM	SiCl4 MFC set to  0.000000
4/14/2011	4:47:36 PM	Bypass solenoid MFC set to  0.000000
4/14/2011	4:47:36 PM	Tube furnace set to 0
4/14/2011	4:48:54 PM	Helium valve closed
4/14/2011	4:48:54 PM	BCl3 valve closed
4/14/2011	4:48:54 PM	PH3 valve closed
4/14/2011	4:48:54 PM	SiCl4 pre valve closed
4/14/2011	4:48:54 PM	SiCl4 post valve closed
4/14/2011	4:48:54 PM	Main Vac valve closed
4/14/2011	4:48:54 PM	Bypass valve closed
4/14/2011	4:48:54 PM	H2 valve opened
4/14/2011	4:48:54 PM	Bubbler valve opened
4/14/2011	4:48:55 PM	Helium MFC set to  0.000000
4/14/2011	4:48:55 PM	H2 MFC set to  500.000000
4/14/2011	4:48:55 PM	BCl3 MFC set to  0.000000
4/14/2011	4:48:55 PM	PHl3 MFC set to  0.000000
4/14/2011	4:48:55 PM	SiCl4 MFC set to  0.000000
4/14/2011	4:48:55 PM	Bypass solenoid MFC set to  0.000000
4/14/2011	4:48:55 PM	Tube furnace set to 1000
4/14/2011	5:08:55 PM	Helium valve closed
4/14/2011	5:08:55 PM	BCl3 valve closed
4/14/2011	5:08:55 PM	PH3 valve closed
4/14/2011	5:08:55 PM	SiCl4 pre valve closed
4/14/2011	5:08:55 PM	SiCl4 post valve closed
4/14/2011	5:08:55 PM	Main Vac valve closed
4/14/2011	5:08:55 PM	Bypass valve closed
4/14/2011	5:08:55 PM	H2 valve opened
4/14/2011	5:08:55 PM	Bubbler valve opened
4/14/2011	5:08:55 PM	Helium MFC set to  0.000000
4/14/2011	5:08:55 PM	H2 MFC set to  500.000000
4/14/2011	5:08:55 PM	BCl3 MFC set to  0.000000
4/14/2011	5:08:55 PM	PHl3 MFC set to  0.000000
4/14/2011	5:08:55 PM	SiCl4 MFC set to  0.000000
4/14/2011	5:08:55 PM	Bypass solenoid MFC set to  0.000000
4/14/2011	5:08:55 PM	Tube furnace set to 1000
4/14/2011	6:08:55 PM	H2 valve closed
4/14/2011	6:08:55 PM	BCl3 valve closed
4/14/2011	6:08:55 PM	PH3 valve closed
4/14/2011	6:08:55 PM	SiCl4 pre valve closed
4/14/2011	6:08:55 PM	SiCl4 post valve closed
4/14/2011	6:08:55 PM	Main Vac valve closed
4/14/2011	6:08:55 PM	Bypass valve closed
4/14/2011	6:08:55 PM	Helium valve opened
4/14/2011	6:08:55 PM	Bubbler valve opened
4/14/2011	6:08:55 PM	Helium MFC set to  500.000000
4/14/2011	6:08:55 PM	H2 MFC set to  0.000000
4/14/2011	6:08:55 PM	BCl3 MFC set to  0.000000
4/14/2011	6:08:55 PM	PHl3 MFC set to  0.000000
4/14/2011	6:08:55 PM	SiCl4 MFC set to  0.000000
4/14/2011	6:08:55 PM	Bypass solenoid MFC set to  0.000000
4/14/2011	6:08:55 PM	Tube furnace set to 0
4/14/2011	6:28:55 PM	Helium valve closed
4/14/2011	6:28:55 PM	H2 valve closed
4/14/2011	6:28:55 PM	BCl3 valve closed
4/14/2011	6:28:55 PM	PH3 valve closed
4/14/2011	6:28:55 PM	SiCl4 pre valve closed
4/14/2011	6:28:55 PM	SiCl4 post valve closed
4/14/2011	6:28:55 PM	Main Vac valve closed
4/14/2011	6:28:55 PM	Bypass valve closed
4/14/2011	6:28:55 PM	Bubbler valve closed
4/14/2011	6:28:55 PM	Helium MFC set to  0.000000
4/14/2011	6:28:55 PM	H2 MFC set to  0.000000
4/14/2011	6:28:55 PM	BCl3 MFC set to  0.000000
4/14/2011	6:28:55 PM	PHl3 MFC set to  0.000000
4/14/2011	6:28:55 PM	SiCl4 MFC set to  0.000000
4/14/2011	6:28:55 PM	Bypass solenoid MFC set to  0.000000
4/14/2011	6:28:55 PM	Tube furnace set to 0
4/14/2011	6:28:56 PM	Run finished at 6:28 PM
4/14/2011	7:12:32 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/14/2011	7:12:32 PM	Recipe started at 7:12 PM
4/14/2011	7:12:32 PM	H2 valve closed
4/14/2011	7:12:32 PM	BCl3 valve closed
4/14/2011	7:12:32 PM	PH3 valve closed
4/14/2011	7:12:32 PM	SiCl4 pre valve closed
4/14/2011	7:12:32 PM	SiCl4 post valve closed
4/14/2011	7:12:32 PM	Main Vac valve closed
4/14/2011	7:12:32 PM	Bypass valve closed
4/14/2011	7:12:32 PM	Bubbler valve closed
4/14/2011	7:12:32 PM	Helium valve opened
4/14/2011	7:12:32 PM	Helium MFC set to  500.000000
4/14/2011	7:12:32 PM	H2 MFC set to  0.000000
4/14/2011	7:12:32 PM	BCl3 MFC set to  0.000000
4/14/2011	7:12:32 PM	PHl3 MFC set to  0.000000
4/14/2011	7:12:32 PM	SiCl4 MFC set to  0.000000
4/14/2011	7:12:32 PM	Bypass solenoid MFC set to  0.000000
4/14/2011	7:12:33 PM	Tube furnace set to 0
4/14/2011	7:12:42 PM	Helium valve closed
4/14/2011	7:12:42 PM	H2 valve closed
4/14/2011	7:12:42 PM	BCl3 valve closed
4/14/2011	7:12:42 PM	PH3 valve closed
4/14/2011	7:12:42 PM	SiCl4 pre valve closed
4/14/2011	7:12:42 PM	SiCl4 post valve closed
4/14/2011	7:12:42 PM	Main Vac valve closed
4/14/2011	7:12:42 PM	Bypass valve closed
4/14/2011	7:12:42 PM	Bubbler valve closed
4/14/2011	7:12:42 PM	Helium MFC set to  0.000000
4/14/2011	7:12:42 PM	H2 MFC set to  0.000000
4/14/2011	7:12:42 PM	BCl3 MFC set to  0.000000
4/14/2011	7:12:42 PM	PHl3 MFC set to  0.000000
4/14/2011	7:12:42 PM	SiCl4 MFC set to  0.000000
4/14/2011	7:12:42 PM	Bypass solenoid MFC set to  0.000000
4/14/2011	7:12:42 PM	Tube furnace set to 0
4/14/2011	7:12:42 PM	Run finished at 7:12 PM
4/14/2011	7:12:42 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/14/2011	7:15:39 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/14/2011	7:15:39 PM	Recipe started at 7:15 PM
4/14/2011	7:15:39 PM	Helium valve closed
4/14/2011	7:15:39 PM	H2 valve closed
4/14/2011	7:15:39 PM	BCl3 valve closed
4/14/2011	7:15:39 PM	PH3 valve closed
4/14/2011	7:15:39 PM	SiCl4 pre valve closed
4/14/2011	7:15:39 PM	SiCl4 post valve closed
4/14/2011	7:15:39 PM	Main Vac valve closed
4/14/2011	7:15:39 PM	Bubbler valve closed
4/14/2011	7:15:39 PM	Bypass valve opened
4/14/2011	7:15:39 PM	Helium MFC set to  0.000000
4/14/2011	7:15:39 PM	H2 MFC set to  0.000000
4/14/2011	7:15:39 PM	BCl3 MFC set to  0.000000
4/14/2011	7:15:39 PM	PHl3 MFC set to  0.000000
4/14/2011	7:15:39 PM	SiCl4 MFC set to  0.000000
4/14/2011	7:15:39 PM	Bypass solenoid MFC set to  0.000000
4/14/2011	7:15:40 PM	Tube furnace set to 0
4/14/2011	7:16:10 PM	Helium valve closed
4/14/2011	7:16:10 PM	H2 valve closed
4/14/2011	7:16:10 PM	BCl3 valve closed
4/14/2011	7:16:10 PM	PH3 valve closed
4/14/2011	7:16:10 PM	SiCl4 pre valve closed
4/14/2011	7:16:10 PM	SiCl4 post valve closed
4/14/2011	7:16:10 PM	Bubbler valve closed
4/14/2011	7:16:10 PM	Main Vac valve opened
4/14/2011	7:16:10 PM	Bypass valve opened
4/14/2011	7:16:10 PM	Helium MFC set to  0.000000
4/14/2011	7:16:10 PM	H2 MFC set to  0.000000
4/14/2011	7:16:10 PM	BCl3 MFC set to  0.000000
4/14/2011	7:16:10 PM	PHl3 MFC set to  0.000000
4/14/2011	7:16:10 PM	SiCl4 MFC set to  0.000000
4/14/2011	7:16:10 PM	Bypass solenoid MFC set to  0.000000
4/14/2011	7:16:10 PM	Tube furnace set to 0
4/14/2011	7:16:10 PM	Run finished at 7:16 PM
4/14/2011	7:16:10 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/14/2011	11:45:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/14/2011	11:45:06 PM	Recipe started at 11:45 PM
4/14/2011	11:45:06 PM	H2 valve closed
4/14/2011	11:45:06 PM	BCl3 valve closed
4/14/2011	11:45:06 PM	PH3 valve closed
4/14/2011	11:45:06 PM	SiCl4 pre valve closed
4/14/2011	11:45:06 PM	SiCl4 post valve closed
4/14/2011	11:45:06 PM	Main Vac valve closed
4/14/2011	11:45:06 PM	Bypass valve closed
4/14/2011	11:45:06 PM	Bubbler valve closed
4/14/2011	11:45:06 PM	Helium valve opened
4/14/2011	11:45:06 PM	Helium MFC set to  500.000000
4/14/2011	11:45:06 PM	H2 MFC set to  0.000000
4/14/2011	11:45:06 PM	BCl3 MFC set to  0.000000
4/14/2011	11:45:06 PM	PHl3 MFC set to  0.000000
4/14/2011	11:45:06 PM	SiCl4 MFC set to  0.000000
4/14/2011	11:45:06 PM	Bypass solenoid MFC set to  0.000000
4/14/2011	11:45:06 PM	Tube furnace set to 0
4/14/2011	11:46:26 PM	Helium valve closed
4/14/2011	11:46:26 PM	H2 valve closed
4/14/2011	11:46:26 PM	BCl3 valve closed
4/14/2011	11:46:26 PM	PH3 valve closed
4/14/2011	11:46:26 PM	SiCl4 pre valve closed
4/14/2011	11:46:26 PM	SiCl4 post valve closed
4/14/2011	11:46:26 PM	Main Vac valve closed
4/14/2011	11:46:26 PM	Bypass valve closed
4/14/2011	11:46:26 PM	Bubbler valve closed
4/14/2011	11:46:26 PM	Helium MFC set to  0.000000
4/14/2011	11:46:26 PM	H2 MFC set to  0.000000
4/14/2011	11:46:26 PM	BCl3 MFC set to  0.000000
4/14/2011	11:46:26 PM	PHl3 MFC set to  0.000000
4/14/2011	11:46:26 PM	SiCl4 MFC set to  0.000000
4/14/2011	11:46:26 PM	Bypass solenoid MFC set to  0.000000
4/14/2011	11:46:26 PM	Tube furnace set to 0
4/14/2011	11:46:26 PM	Run finished at 11:46 PM
4/14/2011	11:46:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/14/2011	11:57:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/14/2011	11:57:31 PM	Recipe started at 11:57 PM
4/14/2011	11:57:31 PM	Helium valve closed
4/14/2011	11:57:31 PM	H2 valve closed
4/14/2011	11:57:31 PM	BCl3 valve closed
4/14/2011	11:57:31 PM	PH3 valve closed
4/14/2011	11:57:31 PM	SiCl4 pre valve closed
4/14/2011	11:57:31 PM	SiCl4 post valve closed
4/14/2011	11:57:31 PM	Main Vac valve closed
4/14/2011	11:57:31 PM	Bubbler valve closed
4/14/2011	11:57:31 PM	Bypass valve opened
4/14/2011	11:57:31 PM	Helium MFC set to  0.000000
4/14/2011	11:57:31 PM	H2 MFC set to  0.000000
4/14/2011	11:57:32 PM	BCl3 MFC set to  0.000000
4/14/2011	11:57:32 PM	PHl3 MFC set to  0.000000
4/14/2011	11:57:32 PM	SiCl4 MFC set to  0.000000
4/14/2011	11:57:32 PM	Bypass solenoid MFC set to  0.000000
4/14/2011	11:57:32 PM	Tube furnace set to 0
4/14/2011	11:58:03 PM	Helium valve closed
4/14/2011	11:58:03 PM	H2 valve closed
4/14/2011	11:58:03 PM	BCl3 valve closed
4/14/2011	11:58:03 PM	PH3 valve closed
4/14/2011	11:58:03 PM	SiCl4 pre valve closed
4/14/2011	11:58:03 PM	SiCl4 post valve closed
4/14/2011	11:58:03 PM	Bubbler valve closed
4/14/2011	11:58:03 PM	Main Vac valve opened
4/14/2011	11:58:03 PM	Bypass valve opened
4/14/2011	11:58:03 PM	Helium MFC set to  0.000000
4/14/2011	11:58:03 PM	H2 MFC set to  0.000000
4/14/2011	11:58:03 PM	BCl3 MFC set to  0.000000
4/14/2011	11:58:03 PM	PHl3 MFC set to  0.000000
4/14/2011	11:58:03 PM	SiCl4 MFC set to  0.000000
4/14/2011	11:58:03 PM	Bypass solenoid MFC set to  0.000000
4/14/2011	11:58:04 PM	Tube furnace set to 0
4/14/2011	11:58:04 PM	Run finished at 11:58 PM
4/14/2011	11:58:04 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/14/2011	11:58:38 PM	Helium valve opened
4/14/2011	11:58:41 PM	Helium MFC set to  100.000000
4/14/2011	11:59:35 PM	Helium valve closed
4/14/2011	11:59:59 PM	Helium valve opened
